| Travel |
60 mm |
60 mm |
110 mm |
110 mm |
| Accuracy(1) |
±2.5 μm (±100 μin) |
±250 nm (±10 μin) |
±4.0 μm (±160 μin) |
±300 nm (±12 μin) |
| Resolution |
1 nm (0.04 μin) |
1 nm (0.04 μin) |
1 nm (0.04 μin) |
1 nm (0.04 μin) |
| Repeatability (Bi-Directional) (1) |
±100 nm (±4 μin) |
±75 nm (±3 μin) |
±100 nm (±4 μin) |
±75 nm (±3 μin) |
| Repeatability (Uni-Directional) |
±25 nm (±1 μin) |
±25 nm (±1 μin) |
±25 nm (±1 μin) |
±25 nm (±1 μin) |
| Straightness(1) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
| Flatness(1) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
±1.5 μm (±60 μin) |
| Pitch |
10 arc sec |
10 arc sec |
12 arc sec |
12 arc sec |
| Roll |
10 arc sec |
10 arc sec |
12 arc sec |
12 arc sec |
| Yaw |
5 arc sec |
5 arc sec |
6 arc sec |
6 arc sec |
| Orthogonality |
10 arc sec |
3 arc sec |
10 arc sec |
3 arc sec |
| Maximum Speed |
350 mm/s (14 in/s) (Upper Axis) |
350 mm/s (14 in/s) (Upper Axis) |
350 mm/s (14 in/s) (Upper Axis) |
350 mm/s (14 in/s) (Upper Axis) |
| Maximum Acceleration |
1 g - 10 m/s2 (No Load)(Upper Axis) |
1 g - 10 m/s2 (No Load)(Upper Axis) |
1 g - 10 m/s2 (No Load)(Upper Axis) |
1 g - 10 m/s2 (No Load)(Upper Axis) |
| Speed Stability |
See graph for typical performance |
| Settling Time |
See graph for typical performance |
| In-Position Stability(2) |
<1 nm (<0.04 μin) |
<1 nm (<0.04 μin) |
<1 nm (<0.04 μin) |
<1 nm (<0.04 μin) |
| Maximum Force (Continuous) |
23 N |
23 N |
23 N |
23 N |
| Load Capacity(3) |
Horizontal |
12.0 kg (26.5 lb) |
12.0 kg (26.5 lb) |
12.0 kg (26.5 lb) |
12.0 kg (26.5 lb) |
| Moving Mass |
Upper |
1.5 kg (3.3 lb) |
1.5 kg (3.3 lb) |
2.1 kg (4.6 lb) |
2.1 kg (4.6 lb) |
| Lower |
4.2 kg (9.2 lb) |
4.2 kg (9.2 lb) |
5.7 kg (12.5 lb) |
5.7 kg (12.5 lb) |
| Stage Mass |
5.5 kg (12.1 lb) |
5.5 kg (12.1 lb) |
7.4 kg (16.3 lb) |
7.4 kg (16.3 lb) |
| Material |
Aluminum Body/Black Hardcoat Finish |
| MTBF (Mean Time Between Failure) |
30,000 Hours |
Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.
| Travel |
160 mm |
160 mm |
| Accuracy(1) |
±5.0 μm (±200 μin) |
±300 nm (±12 μin) |
| Resolution |
1 nm (0.04 μin) |
1 nm (0.04 μin) |
| Repeatability (Bi-Directional) (1) |
±100 nm (±4 μin) |
±75 nm (±3 μin) |
| Repeatability (Uni-Directional) (1) |
±25 nm (±1 μin) |
±25 nm (±1 μin) |
| Straightness(1) |
±2.0 μm (±80 μin) |
±2.0 μm (±80 μin) |
| Flatness(1) |
±2.0 μm (±80 μin) |
±2.0 μm (±80 μin) |
| Pitch |
15 arc sec |
15 arc sec |
| Roll |
15 arc sec |
15 arc sec |
| Yaw |
8 arc sec |
8 arc sec |
| Orthogonality |
10 arc sec |
3 arc sec |
| Maximum Speed |
350 mm/s (14 in/s) (Upper Axis) |
350 mm/s (14 in/s) (Upper Axis) |
| Maximum Acceleration |
1 g - 10 m/s2 (No Load)(Upper Axis) |
1 g - 10 m/s2 (No Load)(Upper Axis) |
| Speed Stability |
See graph for typical performance |
| Settling Time |
See graph for typical performance |
| In-Position Stability(2) |
<1 nm (<0.04 μin) |
<1 nm (<0.04 μin) |
| Maximum Force (Continuous) |
23 N |
23 N |
| Load Capacity(3) |
Horizontal |
12.0 kg (26.5 lb) |
12.0 kg (26.5 lb) |
| Moving Mass |
Upper |
2.4 kg (5.3 lb) |
2.4 kg (5.3 lb) |
| Lower |
6.9 kg (15.2 lb) |
6.9 kg (15.2 lb) |
| Stage Mass |
8.9 kg (19.6 lb) |
8.9 kg (19.6 lb) |
| Material |
Aluminum Body/Black Hardcoat Finish |
| MTBF (Mean Time Between Failure) |
30,000 Hours |
Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.
| Drive
System |
Brushless
Linear Servomotor |
| Feedback |
Noncontact
Linear Encoder |
| Maximum
Bus Voltage |
±40 VDC |
| Limit
Switches |
5 V,
Normally Closed |
| Home
Switch |
Near
Center |
| Multi-Axis |
A3200 |
Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH |
| Ensemble |
Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH |
| Single
Axis |
Soloist |
Soloist
ML-MXH |
Notes:
1. Linear
amplifiers are required to achieve the listed specifications. Other options are
available.
Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Sales Engineering for more information.
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