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 Aerotech has designed and implemented high-performance motion control and positioning systems for flat-panel display fabrication. We also specialize in manufacturing motion control and positioning systems for vacuum applications. So whether a customer needs off-the-shelf systems and components or a custom-engineered system manufactured and tested to exacting specifications, Aerotech can provide the optimal solution for your application. Aerotech manufactures complete vacuum-compatible motion systems
for high-performance applications. Platforms are available in
a wide variety of multi-axis configurations to achieve the complex
motions you require. These systems include ultra-high accuracy
with nanometer-level in-position stability. Vacuum preparation
for 10-8 torr (1.3 x 10-8 mbar) is achieved by incorporating vented hardware, vacuum compatible
lubrication, and special cabling. Custom systems can achieve 10-9 torr vacuum levels. Aerotech can provide systems with partial
pressure (outgassing) limits at specific atomic mass units. Systems
are RGA verification tested. Aerotech also manufactures brushless
linear and rotary motors with tightly controlled magnetic fields
that can be liquid- or gas-cooled to improve thermal management.
Finally, special handling and cleaning procedures along with careful
material selection allow for the lowest Total Mass Loss (TML)
and Collected Volatile Condensable Materials (CVCM) possible. Download a PDF version of our Automation Solutions for Semiconductor and Flat-Panel Display Manufacturing brochure. |
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